Recent progress in actuation technologies of micro/nanorobots

• Ke Xu and
• Bing Liu

Beilstein J. Nanotechnol. 2021, 12, 756–765, doi:10.3762/bjnano.12.59

• few latest achievements on actuation methods are presented. On this basis, the principles of various actuation methods and their limitations are also analyzed. Finally, some key challenges in the development of micro/nanorobots are summarized and the next development direction of the field is explored

• . Keywords: actuation methods; external field actuation; micro/nanorobots; self-actuation; Introduction In the past few decades, micro/nanorobots have developed rapidly as an emerging field of robotics. Macroscale robots are limited in their use in specific scenarios such as working in small spaces. In

• , and acoustic fields. The other is self-actuation, which includes chemical self-actuation, biological self-actuation, and other methods. Various actuation methods are used for micro/nanorobots, which add a certain degree of complexity compared to traditional macroscale robots. The selection of

Review: Electrostatically actuated nanobeam-based nanoelectromechanical switches – materials solutions and operational conditions

• Liga Jasulaneca,
• Jelena Kosmaca,
• Raimonds Meija,
• Jana Andzane and
• Donats Erts

Beilstein J. Nanotechnol. 2018, 9, 271–300, doi:10.3762/bjnano.9.29

• thermal [64] or piezoelectric [65] actuation methods. Main architectures and basic operational principles of electrostatically actuated nanobeam-based NEM switches In general, electrostatically actuated nanobeam-based NEM switches can be divided into two main groups: two-terminal (2T) switches, employing

Multimodal cantilevers with novel piezoelectric layer topology for sensitivity enhancement

• Steven Ian Moore,
• Michael G. Ruppert and
• Yuen Kuan Yong

Beilstein J. Nanotechnol. 2017, 8, 358–371, doi:10.3762/bjnano.8.38

• impossible in liquids [23][24] and can alter the cantilever response rendering the identification and subsequent analysis of higher modes exceedingly difficult. For this reason, numerous integrated actuation methods such as magnetic [25], photothermal [26], resistive thermal [27], ultrasonic [28] or via a

Influence of spurious resonances on the interaction force in dynamic AFM

• Luca Costa and
• Mario S. Rodrigues

Beilstein J. Nanotechnol. 2015, 6, 420–427, doi:10.3762/bjnano.6.42

• and to apply an electrostatic excitation to the conductive cantilever at a frequency close to resonance. Excitation of the tip in air and in liquid with different actuation methods: a) electrostatic excitation of the cantilever in air (black) and in liquid (blue); b) Amplitude of the tip directly